Surface profilometry using the incoherent self-imaging technique in reflection mode-Reference-Cited by-同舟云学术

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Surface profilometry using the incoherent self-imaging technique in reflection mode

Published:2018-01-21 Issue:3 Volume:123 Page:035302
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Hassani Khosrow¹^ORCID,Nahal Arashmid²,Tirandazi Negin²

Affiliation:

1. Optics Research Laboratory 3, Department of Physics, College of Sciences, University of Tehran, 1439955961 Tehran, Iran

2. Optical Metrology Research Laboratory, Department of Physics, College of Sciences, University of Tehran, 1439955961 Tehran, Iran

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5008951

Reference36 articles.

1. J. Schmit , K. Creath , and J. C. Wyant , in Optical Shop Testing, edited by D. Malacara ( John Wiley & Sons, 2007), Chap. 15, pp. 667–742.

2. Optical Measurement of Surface Topography

3. Handbook of Optical Metrology

4. Thin film thickness measurement: A comparison of various techniques

5. Advances on Talbot projection profilometry

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1. Fractional Lau effect with binary gratings: A frequency analysis;Results in Optics;2022-12

2. Simple setup to measure the phase map of transparent objects based on incoherent self-imaging;Optical Engineering;2022-03-11

3. Full-description of integer Lau effect with arbitrary amplitude diffracting grating;Optik;2018-12

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