1. Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, D-04318 Leipzig, Germany
2. Leibniz Joint Lab “Single Ion Implantation,” Permoserstr. 15, D-04318 Leipzig, Germany
3. Applied Quantum Systems, Felix Bloch Institute for Solid State Physics, Universität Leipzig, Linnestr. 5, D-04103 Leipzig, Germany