Copper vapor laser machining of polyimide and polymethylmethacrylate in atmospheric pressure air
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.351466
Reference13 articles.
1. Laser ablation of polymers
2. Sub-micron lithography techniques
3. Deep ultraviolet laser etching of vias in polyimide films
4. Excimer and CO2laser interactions with foamed polystyrene
5. Ultrafast imaging of 0.532‐μm laser ablation of polymers: Time evolution of surface damage and blast wave generation
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1. Micromachining and dicing of sapphire, gallium nitride and micro LED devices with UV copper vapour laser;Thin Solid Films;2004-04
2. High repetition rate effect on the chemical characteristics and composition of Upilex-S polyimide ablated by a UV Nd:YAG laser;Surface and Coatings Technology;2002-10
3. Laser ablation of Upilex-S polyimide: influence of laser wavelength on chemical structure and composition in both ablated area and halo;Surface and Coatings Technology;2001-08
4. Preliminary Studies of the Characteristics and Factors Influencing the Emission from a Copper Vapor Laser-Induced Plasma;Applied Spectroscopy;2000-06
5. Resonant absorption of a short-pulse laser in a doped dielectric;Applied Physics Letters;1999-05-17
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