Mechanically robust, electrically stable metal arrays on plasma-oxidized polydimethylsiloxane for stretchable technologies
Author:
Affiliation:
1. Institut d'Electronique, de Microélectronique et de Nanotechnologie (IEMN), CNRS UMR8520, University of Lille, Avenue Poincaré, Cité Scientifique, Villeneuve d'Ascq 59652, France
Funder
EQUIPEX (Equipment of Excellence) [France]
RENATECH (French national nanofabrication network) [France]
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4927616
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