1. Chaozhou Branch of Chemistry and Chemical Engineering Guangdong Laboratory 1 , Chaozhou 521000, Guangdong, People’s Republic of China
2. State Key Lab of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology 2 , Wuhan 430070, People’s Republic of China
3. Hubei Key Laboratory of Plasma Chemistry and Advanced Materials, Engineering Research Center of Environmental Materials and Membrane Technology of Hubei Province, School of Materials Science and Engineering, Wuhan Institute of Technology 3 , Wuhan 430074, People’s Republic of China
4. Qingdao Kairui Electronics Co., Ltd. 4 , Qingdao 266000, China
5. Institute for Applied Materials - Applied Materials Physics, Karlsruhe Institute of Technology 5 , Hermann-von-Helmholtz Platz 1, 76344 Eggenstein-Leopoldshafen, Germany