Low resistivity indium tin oxide films by pulsed laser deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109736
Reference15 articles.
1. Preparation of conducting and transparent thin films of tin‐doped indium oxide by magnetron sputtering
2. Effect of target‐substrate distance on the growth and properties of rf‐sputtered indium tin oxide films
3. The influence of deposition parameters on the optical and electrical properties of r.f.-sputter- deposited indium tin oxide films
4. Transparent conducting zinc oxide and indium–tin oxide films prepared by modified reactive planar magnetron sputtering
5. Preparation of Sn‐doped In2O3(ITO) films at low deposition temperatures by ion‐beam sputtering
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