Detection of hydrogen atoms in SiH4–H2 radio-frequency plasmas using two-photon laser-induced fluorescence
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1486033
Reference21 articles.
1. Laser-induced resonance fluorescence as a diagnostic technique in non-thermal equilibrium plasmas
2. Two‐photon laser‐induced fluorescence measurements of absolute atomic hydrogen densities and powder formation in a silane discharge
3. Measurement of SiH2Densities in an RF-Discharge Silane Plasmae Used in the Chemical Vapor Deposition of Hydrogenated Amorphous Silicon Film
4. Effect of Laser-Induced Dissociation during Measurements of Hydrogen Atoms in Silane Plasmas Using Two-Photon-Excited Laser-Induced Fluorescence
5. Laser‐induced dissociation of molecules during measurements of hydrogen atoms in processing plasmas using two‐photon laser‐induced fluorescence
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