Monte Carlo modeling of the dc saddle field plasma: Discharge characteristics of N2 and SiH4
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2409566
Reference31 articles.
1. DC Saddle-Field Plasma-Enhanced Vapour Deposition
2. Gas-phase diagnosis and high-rate growth of stable a-Si:H
3. Key issues for fabrication of high quality amorphous and microcrystalline silicon solar cells
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5. A Charged Particle Oscillator
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