Beryllium foil transition‐radiation source for x‐ray lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105962
Reference8 articles.
1. X-ray lithography, where it is now, and where it is going
2. Increased x‐ray power from a transition‐radiation source
3. Transition Radiation As An X-Ray Source For Lithography
4. Measurement of the x‐ray power from transition radiators
5. X-ray microlithography with a transition radiation source
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Targets emitting transition radiation for performing X-ray lithography by the tabletop synchrotron MIRRORCLE-20SX;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2008-06
2. Estimation of soft X-ray and EUV transition radiation power emitted from the MIRRORCLE-type tabletop synchrotron;Journal of Synchrotron Radiation;2007-02-14
3. Extreme ultraviolet emission from non-relativistic electrons penetrating a multilayer nanostructure;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-01
4. Optimization of transition radiation emitting targets for storage ring synchrotrons used as X-ray lithography sources;Applied Physics B;2006-08-08
5. Theory and characteristics of transition radiation emitted by low-energy storage-ring synchrotrons for use in X-ray lithography;Journal of Synchrotron Radiation;2006-06-15
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