Development of fixed-point two-degree-of-freedom angular error measurement system with precision improvement function

Abstract

In the field of precision industries, measuring micro-angular errors plays a crucial role in improving the accuracy of equipment. Therefore, this study aims to develop a two-degree-of-freedom (two-DOF) angular error measurement system for simultaneously measuring the assembly angle errors of the bond head in a die bonding machine. This system is based on the laser collimation method and constructed by using components such as a fiber laser and position-sensitive detectors. It utilizes the angular drift compensation of the laser beam and averaging function to improve the measurement accuracy. In addition, the mathematical model of the proposed system was established by using skew-ray tracing. Through experiments, the measuring accuracy of ±0.25 arcsec and measuring repeatability of 0.3 arcsec could be achieved.