Particle simulation of ion optics and grid erosion for two‐grid and three‐grid systemsa)
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1144823
Reference3 articles.
1. Sputtering Yields for Low Energy He+‐, Kr+‐, and Xe+‐Ion Bombardment
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