Efficient keV x‐ray generation from 50 mJ KrF laser plasmas
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.107174
Reference8 articles.
1. Laser plasma x‐ray sources for microlithography
2. Soft x‐ray emission from ω0, 2ω0, and 4ω0laser‐produced plasmas
3. Soft x‐ray emission from ω0, 2ω0, and 4ω0laser‐produced plasmas
4. X‐ray generation from 50‐mJ, 120‐ps KrF laser‐produced plasmas
5. Simple generation of high-power, picosecond, tunable excimer laser pulses
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1. Measurements of x-ray spectra and absolute energies of laser produced Al plasmas;Sixth International Symposium on Laser Interaction with Matter;2022-12-22
2. Laser-Produced Plasmas as Short-Wavelength Incoherent Optical Sources;Experimental Methods in the Physical Sciences;1997
3. Optimization of x‐ray sources for proximity lithography produced by a high average power Nd:glass laser;Journal of Applied Physics;1996-06
4. Li- and He-like satellite emission from aluminium plasma produced by a 12 ps KrF laser;Journal of Physics B: Atomic, Molecular and Optical Physics;1995-05-14
5. Melting and damage of aluminum surfaces by 80 ps KrF laser pulses;Optics Communications;1994-10
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