Enhanced reflectivity of soft x‐ray multilayer mirrors by reduction of Si atomic density
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110179
Reference11 articles.
1. Smoothing of multilayer x‐ray mirrors by ion polishing
2. Ion etching of thin W layers: enhanced reflectivity of W-C multilayer coatings
3. Ion beam modification of MoSi multilayer systems for X-ray reflection
4. Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering
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