Effect of damage incubation in the laser grooving of sapphire-Reference-Cited by-同舟云学术

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Effect of damage incubation in the laser grooving of sapphire

Published:2019-05-07 Issue:17 Volume:125 Page:173109
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Sakurai Haruyuki¹,He Chao²³,Konishi Kuniaki⁴,Tamaru Hiroharu⁴,Yumoto Junji¹⁴,Kuwata-Gonokami Makoto¹,Gillner Arnold²³

Affiliation:

1. Department of Physics, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan

2. Chair for Laser Technology LLT, RWTH Aachen University, Steinbachstr. 15, 52074 Aachen, Germany

3. Fraunhofer Institute for Laser Technology ILT, Steinbachstr. 15, 52074 Aachen, Germany

4. Institute for Photon Science and Technology, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan

Funder

Ministry of Education, Culture, Sports, Science and Technology

Center of Innovation Program

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5091951

Reference39 articles.

1. Ultrafast lasers—reliable tools for advanced materials processing

2. Ultrafast laser processing of materials: from science to industry

3. Overview and outlook of through‐silicon via (TSV) and 3D integrations

4. Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias

5. Dynamics of femtosecond laser interactions with dielectrics

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