Transition from amorphous to crystal growth of boron films in plasma‐enhanced chemical vapor deposition with B2H6+He
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.343853
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4. Influence of atomic hydrogen on the growth reactions of amorphous boron films in a low‐pressure B2H6+He+H2plasma
5. Simultaneous growth of rhombohedral and amorphous boron films in a low pressure B2H6+H2+He plasma
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