A novel vibration assisted polishing device based on the flexural mechanism driven by the piezoelectric actuators
Author:
Affiliation:
1. College of Mechanical Science and Engineering, Jilin University, Changchun 130022, China
2. Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, Tianjin University of Technology, Tianjin 300384, China
Funder
National Natural Science Foundation of China
China Postdoctoral Science Foundation
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5009027
Reference30 articles.
1. The Effects of Ultrasonic Vibration Parameters on Machining Performance in Turning of Mild Steels
2. Investigation of Material Removal and Surface Topography Formation in Vibratory Finishing
3. Effects of the ultrasonic flexural vibration on the interaction between the abrasive particles; pad and sapphire substrate during chemical mechanical polishing (CMP)
4. Theoretical and experimental investigation of surface generation in swing precess bonnet polishing of complex three-dimensional structured surfaces
5. Modelling and simulation of structure surface generation using computer controlled ultra-precision polishing
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