1. Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences 1 , P.O. Box 603, Beijing 100190, China
2. ACME (Beijing) Technology Co., Ltd. 2 , Bejing 101407, China
3. Beijing Physike Technology Co., Ltd. 3 , Bejing 100085, China
4. State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences 4 , Beijing 100083, China
5. Songshan Lake Materials Laboratory 5 , Dongguan, Guangdong 523808, China
6. Key Laboratory for Vacuum Physics, University of Chinese Academy of Sciences 6 , Beijing 100190, China