5 W GaAs/GaAlAs laser diodes with a reactive ion etched facet
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.104039
Reference11 articles.
1. GaAs double heterostructure lasers fabricated by wet chemical etching
2. Low threshold GaAs/GaAlAs BH lasers with ion-beam-etched mirrors
3. GaInAsP/InP stripe‐geometry laser with a reactive‐ion‐etched facet
4. Focused-ion-beam micromachined AlGaAs semiconductor laser mirrors
5. GaAs and AlGaAs anisotropic fine pattern etching using a new reactive ion beam etching system
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1. InGaN Laser Diodes with Etched Facets for Photonic Integrated Circuit Applications;Micromachines;2023-02-09
2. InAs Quantum Dot Lasers With Dry Etched Facet by Br-Ion Beam-Assisted Etching;IEEE Photonics Technology Letters;2016-09-15
3. Angle-etched facet laser arrays (fan laser arrays);IEEE Journal of Selected Topics in Quantum Electronics;1997-04
4. Reactive ion etching of GaSb and GaAlSb using SiCl4;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1996-09
5. Effect of facet roughness on etched‐facet semiconductor laser diodes;Applied Physics Letters;1996-03-18
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