Bond‐structure changes of liquid phase deposited oxide (SiO2−xFx) on N2 annealing-Reference-Cited by-同舟云学术

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Bond‐structure changes of liquid phase deposited oxide (SiO2−xFx) on N2 annealing

Published:1995-02-20 Issue:8 Volume:66 Page:938-940
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Yeh Ching‐Fa,Chen Chun‐Lin,Lur Water,Yen Po‐Wen

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.113603

Reference9 articles.

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4. Chemical liquid phase deposition of thin aluminum oxide films;Chinese Journal of Chemistry;2010-08-26

5. Interlevel Dielectrics;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22

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