Ohmic contacts on diamond by B ion implantation and TiC‐Au and TaSi2‐Au metallization
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.358510
Reference13 articles.
1. Optimum semiconductors for high-power electronics
2. The electrical properties and device applications of homoepitaxial and polycrystalline diamond films
3. The potential of diamond and SiC electronic devices for microwave and millimeter-wave power applications
4. Diamond transistor performance and fabrication
5. Preparation of ohmic contacts to semiconducting diamond
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