Design, fabrication, and characterization of picowell arrays on cyclic olefin copolymer surfaces generated with a 10.5 MeV N4+ ion microbeam-Reference-Cited by-同舟云学术

Design, fabrication, and characterization of picowell arrays on cyclic olefin copolymer surfaces generated with a 10.5 MeV N4+ ion microbeam

Published:2023-07-31 Issue:5 Volume:123 Page:
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:

Author:

Bányász I.¹^ORCID,Rajta I.²^ORCID,Havránek V.³^ORCID,Mackova A.³⁴^ORCID,Laki A. J.⁵⁶^ORCID,Kellermayer M. S. Z.⁶^ORCID,Szittner Z.⁷^ORCID,Kurunczi S.⁷^ORCID,Novák Sz.⁷^ORCID,Székács I.⁷^ORCID,Horváth R.⁷^ORCID,Fried M.⁸⁹^ORCID,Nagy G. U. L.²^ORCID

Affiliation:

1. Wigner Research Centre for Physics 1 , P.O. Box 49, H-1525 Budapest, Hungary

2. Atomki, Institute for Nuclear Research 2 , P.O. Box 51, H-4001 Debrecen, Hungary

3. Nuclear Physics Institute AV CR 3 , 250 68 Řež near Prague, Prague, Czech Republic

4. Department of Physics, Faculty of Science, J. E. Purkinje University 4 , Pasteurova 3544/1, 400 96 Ústí nad Labem, Czech Republic

5. Faculty of Information Technology and Bionics, Pázmány Péter Catholic University 5 , Práter u. 50a, H-1083 Budapest, Hungary

6. Department of Biophysics and Radiation Biology, Semmelweis University 6 , Tűzoltó u. 37-47, H-1094 Budapest, Hungary

7. Nanobiosensorics Laboratory, Centre for Energy Research 7 , Konkoly-Thege Rd. 29-33, H-1121 Budapest, Hungary

8. Centre for Energy Research 8 , Konkoly-Thege Rd. 29-33, 1121 Budapest, Hungary

9. Institute of Microelectronics and Technology, Óbuda University 9 , P.O. Box 112, Budapest 1431, Hungary

Abstract

Handling of picoliter-to-nanoliter-scale volumes and objects has increasing importance in life sciences. This is the volume scale of cell extractions and individual living cells. Here, we introduce a method of generating a picoliter-scale device by direct writing of picowell arrays on a ZEONOR™ copolymer surface with high-energy medium-mass ion microbeam. Arrays of various microstructures were written in the sample using a microbeam of 10.5 MeV N4+ ions at various implanted ion fluences. The best array was obtained by implantation of annuli of 10 and 11 μm of inner and outer diameters with a fluence of 7.8 × 1012 ions/cm2.

Funder

CANAM

Czech Science Foundation

OP RDE

MEYS

NKFIH

VOC-DETECT M-ERA-NET

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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