Large fluorine-vacancy clusters in Si and their capture efficiency for self-interstitials
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2338555
Reference14 articles.
1. Role of fluorine in suppressing boron transient enhanced diffusion in preamorphized Si
2. Fluorine in Si: Native-defect complexes and the suppression of impurity diffusion
3. Ab InitioCalculations to Model Anomalous Fluorine Behavior
4. Comment on “Ab InitioCalculations to Model Anomalous Fluorine Behavior”
5. Diebel and Dunham Reply:
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