Lower‐temperature plasma etching of Cu films using infrared radiation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110401
Reference4 articles.
1. Reactive Ion Etching of Copper Films
2. Reactive Ion Etching of Copper Films in SiCl4and N2Mixture
3. Reactive ion etching of copper in SiCl4‐based plasmas
4. Low‐temperature copper etching via reactions with Cl2and PEt3under ultrahigh vacuum conditions
Cited by 40 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Two-Step Cyclic Etching of Copper Thin Films Using Acetylacetone/O2 Gases;ECS Journal of Solid State Science and Technology;2023-07-01
2. Plasma oxidation as an effective method in etching copper interconnect lines at room-temperature;Japanese Journal of Applied Physics;2022-03-01
3. Nanometer-scale etching of copper thin films in high-density plasma of an ethylenediamine/acetic acid/argon gas mixture;Journal of Vacuum Science & Technology B;2022-01
4. Inductively coupled plasma reactive ion etching of copper thin films using ethylenediamine/butanol/Ar plasma;Vacuum;2020-11
5. Development of Cu Etching Using O$_{2}$ Cluster Ion Beam under Acetic Acid Gas Atmosphere;Japanese Journal of Applied Physics;2012-08-20
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3