Particle agglomeration study in rf silane plasmas:Insitustudy by polarization‐sensitive laser light scattering-Reference-Cited by-同舟云学术

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Particle agglomeration study in rf silane plasmas:Insitustudy by polarization‐sensitive laser light scattering

Published:1996-08-15 Issue:4 Volume:80 Page:2069-2078
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Courteille C.,Hollenstein Ch.,Dorier J.‐L.,Gay P.,Schwarzenbach W.,Howling A. A.,Bertran E.,Viera G.,Martins R.,Macarico A.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.363118

Reference42 articles.

1. Particle Distributions and Laser-Particle Interactions in an RF Discharge of Silane

2. In situ laser diagnostic studies of plasma‐generated particulate contamination

3. Charging of Dust Grains in a Plasma

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