Design of silicon-based micro-actuator with two state-recoverable semicircle slides for switching on/off detonation energy

Abstract

The micro-actuator is a key element of the MEMS-based initiator. In order to ensure safety and achieve the function of detonation energy isolation and transmission of the micro-pyrotechnic sequence, it is necessary to set up a safety and arming device between the micro-heater and energetic materials on the next level in the initiator. In this paper, the MEMS safety and arming device was simulated and analyzed, and the actuator chip was made based on MEMS technology and then tested. The results showed that the maximum temperature and displacement generated by the silicon-based micro-actuator increased with increasing actuation voltage. When the actuation voltage was larger than 16 V, the device could not work normally because the maximum temperature of the device was higher than the melting point of silicon. Furthermore, the influence factors on the state-recoverable property of the device were studied by changing the actuation voltage, length, width, and thickness of the V-shaped beam in a single way. The results showed that when the actuation voltage remained unchanged and the other factors were changed in a single way, the smaller structural parameters resulted in the shorter response time and recovery time, while the displacement generated was smaller. Meanwhile, the larger structural parameters resulted in larger displacements, while the response time and recovery time were larger. In addition, the state-recoverable characteristics of the device were affected by the working environmental temperature. It is of great significance to the design of the MEMS-based initiator.