Author:
Zhou F. S.,Wu X. Y.,Zhou F.,Zhang H. X.,Zhang X. J.
Cited by
9 articles.
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1. Sputtering transients for some transition elements during high-fluence MEVVA implantation of Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-02
2. Very low resistance CoSi2 formation by metal vapour vacuum arc implantation into SiO2/Si and Si3N4/Si structures;Surface and Coatings Technology;2000-06
3. High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-11
4. Characterization of a modular broad beam ion source;Plasma Sources Science and Technology;1998-08-01
5. Foreign atom incorporation during metal silicide formation by ion beam synthesis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-02