Influence of ion energy flux on structure and optical properties ofa‐C:H thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.362432
Reference37 articles.
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1. Correlation study of photoluminescence properties and mechanism of hydrogenated amorphous silicon carbide films;Journal of Luminescence;2019-08
2. Hydrogenated Amorphous Carbon Films (a-C:H);Tetrahedrally Bonded Amorphous Carbon Films I;2018
3. Some properties of sputtered a-C:H;Journal of Non-Crystalline Solids;2002-04
4. Influence of the substrate-electrode applied bias voltage on the properties of sputtered a-C:H thin films;Journal of Physics: Condensed Matter;2001-03-15
5. Formation of cationic silicon clusters in a remote silane plasma and their contribution to hydrogenated amorphous silicon film growth;Journal of Applied Physics;1999-10
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