Removal of radiation‐induced electron traps in MOS structures by rf annealing
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91283
Reference24 articles.
1. A New Instability in MOS Transistor Caused by Hot Electron and Hole Injection from Drain Avalanche Plasma into Gate Oxide
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4. Threshold instability in IGFET’s due to emission of leakage electrons from silicon substrate into silicon dioxide
5. Effect of electron trapping on IGFET characteristics
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