Beam current density distribution of a vacuum arc ion source
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1148573
Reference9 articles.
1. Broad beam high average current metal ion source
2. The Beijing metal vapor vacuum arc ion source program
3. Upgrade of a vacuum arc ion source using a strong pulsed magnetic field
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating;Vacuum;2015-02
2. Radial and Angular Resolved Langmuir Probe Diagnosis of a Pulsed Vacuum Arc Plasma;Plasma Science and Technology;2011-12
3. Producing of Gas and Metal Ion Beams with Vacuum Arc Ion Sources;Emerging Applications of Vacuum-Arc-Produced Plasma, Ion and Electron Beams;2002
4. High-current pulse sources of broad beams of gas and metal ions for surface treatment;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2000-01
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