The structure and electrical characteristics of oxidized semi‐insulating polycrystalline silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.345500
Reference29 articles.
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1. Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition;Journal of Vacuum Science & Technology A;2019-03
2. Low-Pressure Chemical Vapor Deposition of Semi-Insulating Polycrystalline Silicon (SIPOS) and its Analysis: Application to Power Diode Passivation;Solid State Phenomena;2001-11
3. Phase distinction in semi-insulating polycrystalline silicon by pattern recognition of X-ray photoelectron spectroscopy/X-ray-induced Auger electron spectroscopy data;Applied Surface Science;1998-09
4. Electrical and optical properties of semi-insulating polycrystalline silicon thin films: the role of microstructure and doping;Materials Science and Engineering: R: Reports;1996-12-15
5. The composition and structure of SIPOS: A high spatial resolution electron microscopy study;Journal of Materials Research;1993-11
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