An acoustic filter based on layered structure
Author:
Affiliation:
1. Department of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh, North Carolina 27695, USA
2. Department of Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina 27695, USA
Funder
National Institutes of Health (NIH)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4915100
Reference29 articles.
1. Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications
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