Monte Carlo simulation of impurity diffusion in thin‐film diffusion barriers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336378
Reference24 articles.
1. Diffusion barriers in thin films
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5. Aluminum‐silicide reactions. I. Diffusion, compound formation, and microstructure
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1. Monte Carlo Simulation of Hydrogen Diffusivity in Aluminum with Anisotropic Grain Boundaries;Japanese Journal of Applied Physics;1998-11-15
2. Grain‐boundary diffusion modeling and efficiency evaluation of thin‐film diffusion barriers considering microstructure effects;Journal of Applied Physics;1995-10
3. Three-dimensional simulation of impurity diffusion in thin-film diffusion barriers;Journal of Electronic Materials;1994-12
4. A Monte Carlo Solution to the Problem of Diffusion in Grain Boundaries;Journal of the American Ceramic Society;1991-04
5. Airways Hyperreactivity, Bronchial Inflammation and Obstructive Lung Disease;Inflammatory Indices in Chronic Bronchitis;1990
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