Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques-Reference-Cited by-同舟云学术

Design considerations for refractive solid immersion lens: Application to subsurface integrated circuit fault localization using laser induced techniques

Published:2009-01 Issue:1 Volume:80 Page:013703
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Goh S. H.,Sheppard C. J. R.,Quah A. C. T.,Chua C. M.,Koh L. S.,Phang J. C. H.

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.3070612

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