Absolute distance measurement method without a non-measurable range and directional ambiguity based on the spectral-domain interferometer using the optical comb of the femtosecond pulse laser-Reference-Cited by-同舟云学术

Absolute distance measurement method without a non-measurable range and directional ambiguity based on the spectral-domain interferometer using the optical comb of the femtosecond pulse laser

Published:2016-12-12 Issue:24 Volume:109 Page:244103
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Park J.¹²,Jin J.¹²,Kim J.-A.¹,Kim J. W.¹²

Affiliation:

1. Division of Physical Metrology, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea

2. Science of Measurement, Korea University of Science and Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea

Funder

Korea Research Institute of Standards and Science (KRISS)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4971836

Reference17 articles.

1. Dispersive interferometric profilometer

2. Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter

3. Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry

4. Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure

5. Thickness and refractive index measurement of a silicon wafer based on an optical comb

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