A reliable MEMS switch using electrostatic levitation
Author:
Affiliation:
1. Mechanical Engineering Department, Binghamton University, 4400 Vestal Parkway East, Binghamton, New York 13901, USA
Funder
National Science Foundation Electrical, Communications, and Cyber Systems
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5053090
Reference26 articles.
1. A low-g electrostatically actuated resonant switch
2. Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability
3. A smart microelectromechanical sensor and switch triggered by gas
4. Resonant Gas Sensor and Switch Operating in Air With Metal-Organic Frameworks Coating
5. M. I. Ibrahim and M. I. Younis , in 2008 Proceedings of the ASME International Mechanical Engineering Congress and Exposition (2009), p. 241.
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