Analysis of a flowing silane dc discharge in the presence of a hot surface
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.334827
Reference12 articles.
1. Electron impact study of ionization and dissociation of monosilane and disilane
2. The Mass Spectra of Volatile Hydrides. I. The Monoelemental Hydrides of the Group IVB and VB Elements
3. The 147-nm photolysis of monosilane
4. Massenspektrometrische Bestimmung von Bindungsenergien in siliciumorganischen Verbindungen / Mass-spectrometric Determination of Bond Dissoziation Energies in Organosilicon Compounds
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1. INFLUENCE OF HYDROGEN, ION DISTRIBUTION AND SILYL RADICAL SURFACE DIFFUSION LENGTH ON SILICON THIN FILM GROWTH UNDER HIGH PRESSURE AND HIGH POWER IN VHF-PECVD;Modern Physics Letters B;2008-07-20
2. Total SiH4/H2 pressure effect on microcrystalline silicon thin films growth and structure;Solar Energy Materials and Solar Cells;2005-05
3. An accurate description of the ground and excited states of SiH;The Journal of Chemical Physics;2002-04-15
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5. Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications;Thin Films and Nanostructures;2002
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