Inductively coupled plasma heating in a weakly magnetized plasma
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.873250
Reference32 articles.
1. Langmuir probe measurements of a radio frequency induction plasma
2. Novel radio‐frequency induction plasma processing techniques
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4. Collisionless electron heating in an inductively coupled discharge
5. Electrical characteristics and electron heating mechanism of an inductively coupled argon discharge
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