Grain size dependence in a self‐implanted silicon layer on laser irradiation energy density
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.89938
Reference6 articles.
1. Annealing of Ion-Implanted Layers Under the Action of Laser Radiation
2. Amorphous-polycrystal transition induced by laser pulse in self-ion implanted silicon
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3. Electrical and Structural Characterization of Boron Implanted Silicon Following Laser Thermal Processing;MRS Proceedings;2002
4. Laser processing of insulator surfaces;Applied Surface Science;1997-02
5. Melting and Solidification;Laser-Beam Interactions with Materials;1995
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