Wireless passive polymer-derived SiCN ceramic sensor with integrated resonator/antenna
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4824827
Reference27 articles.
1. Wireless micromachined ceramic pressure sensor for high-temperature applications
2. A High-Performance n-i-p SiCN Homojunction for Low-Cost and High-Temperature Ultraviolet Detecting Applications
3. Investigation of peptide based surface functionalization for copper ions detection using an ultrasensitive mechanical microresonator
4. Fabrication of a CMOS compatible pressure sensor for harsh environments
5. SiCN ceramic patterns fabricated by soft lithography techniques
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