Photoluminescence properties of partially phase separated silicon nitride films

Author:

Mercaldo Lucia V.,Esposito Emilia M.,Veneri Paola Delli,Rezgui Béchir,Sibai Abel,Bremond Georges

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Silicon Compound Nanomaterials: Exploring Emission Mechanisms and Photobiological Applications;Advanced Photonics Research;2023-06-02

2. Etching Mechanisms of SiO2 and SiNx:H Thin Films in HF/Ethanol Vapor Phase: Toward High Selectivity Batch Release Processes;Journal of Microelectromechanical Systems;2019-08

3. Effect of thermal and pulse laser annealing on photoluminescence of CVD silicon nitride films;Proceedings of the National Academy of Sciences of Belarus. Physics and Mathematics Series;2019-06-28

4. Blue and red light-emitting non-stoichiometric silicon nitride-based structures;Proceedings of the National Academy of Sciences of Belarus. Physics and Mathematics Series;2018-11-01

5. Luminescence of silicon nitride films implanted with nitrogen ions;Materials Research Express;2018-08-17

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