Real time measurement of deposition initiation and rate in laser chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.335680
Reference17 articles.
1. A review of laser–microchemical processing
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5. Wafer-Scale Laser Lithography: I. Pyrolytic Deposition Of Metal Microstructures
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