Low dose depth distribution of recoil implanted atoms
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93759
Reference16 articles.
1. Transmission sputtering and recoil implantation from thin metal films under ion bombardment
2. Recoil implantation of antimony into silicon
3. Recoil implantation from thin surface films on silicon
4. Recoil mixing in solids by energetic ion beams
5. Theoretical aspects of atomic mixing by ion beams
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3. Chemical effects in ion mixing of a ternary system (metal‐SiO2);Applied Physics Letters;1987-03-09
4. Simple Estimates of Recoil Implantation Quantities;physica status solidi (a);1986-07-16
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