Formation of buried TiN in glass by ion implantation to reduce solar load
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.363194
Reference17 articles.
1. Formation of TiN phase in SiO2 and Si through ion implantation of constituent elements
2. High fluence implantation in glasses: chemical interactions
3. XPS Study of Chemical Interactions in Ion-Implanted Silica Glasses
4. Compaction of ion‐implanted fused silica
5. Dispersion measurements of optical waveguides
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1. Amorphous Ge quantum dots embedded in SiO2 formed by low energy ion implantation;Journal of Applied Physics;2008-06-15
2. SELF-ORGANIZED DISTRIBUTION OF EXTREMELY SMALL Ti QUANTUM DOTS IN SiO2;Nano;2007-06
3. Sn quantum dots embedded in SiO[sub 2] formed by low energy ion implantation;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007
4. Ti–Sn alloy nanodot composites embedded in single-crystal SiO2 by low energy dynamic coimplantation;Journal of Applied Physics;2006-10-15
5. Annealing effect on the surface plasmon resonance absorption of a Ti–SiO[sub 2] nanoparticle composite;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006
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