Medium resolution off-axis electron holography with millivolt sensitivity-Reference-Cited by-同舟云学术

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Medium resolution off-axis electron holography with millivolt sensitivity

Published:2007-10 Issue:14 Volume:91 Page:143501
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Cooper David,Truche Robert,Rivallin Pierrette,Hartmann Jean-Michel,Laugier Frederic,Bertin Francois,Chabli Amal,Rouviere Jean-Luc

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2794006

Reference7 articles.

1. Two-Dimensional Mapping of the Electrostatic Potential in Transistors by Electron Holography

2. International Technology Roadmap for Semiconductors, 2001 ed. (Semiconductor Industry Association, San Jose, CA, 2001) (http://public.itrs.net).

3. Experimental study of amplitude and phase detection limits in electron holography

4. Detection limits in quantitative off-axis electron holography

5. The influence of electron irradiation on electron holography of focused ion beam milled GaAs p-n junctions

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