Influence of hydrogen on the electrical and optical activity of misfit dislocations in Si/SiGe epilayers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.112571
Reference12 articles.
1. Cathodoluminescence imaging and spectroscopy of dislocations in Si and Si1−xGexalloys
2. Recombination Activity of Misfit Dislocations in Silicon
3. Characterization of epitaxial and oxidation‐induced stacking faults in silicon: The influence of transition‐metal contamination
4. Investigation of the recombination activity of misfit dislocations in Si/SiGe epilayers by cathodoluminescence imaging and the electron beam induced current technique
5. Two classes of defect recombination behaviour in silicon as studied by SEM-EBIC
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