Temperature compensation in fluid density measurement using micro-electromechanical resonant sensor

Author:

Zhao Libo12,Huang Linya12,Hu Yingjie12,Jiang Weile3,Lu Dejiang12,Li Zhikang12,Zhou Xiangyang4ORCID,Wang Jiuhong12

Affiliation:

1. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi’an Jiaotong University, Xi’an 710049, China

2. School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China

3. Institute of Heritage Sites and Historical Architecture Conservation, Xi’an Jiaotong University, Xi’an 710049, China

4. School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing 100191, China

Funder

Key Research and Development Project of Shannxi Province

National Key Research & Development

the 111 Program

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Instrumentation

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2. An Integrated Intelligent Approach for Monitoring and Management of a Deep Foundation Pit in a Subway Station;Sensors;2022-11-11

3. An immersive resonant sensor with microcantilever for pressure measurement;Sensors and Actuators A: Physical;2020-03

4. Density Measurement Performance in Flowing Liquid Using Microcantilever-Based Resonators under Bending and Torsion Vibrations;2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII);2019-06

5. A resonant microcantilever sensor for in-plane multi-axis magnetic field measurements;Journal of Micromechanics and Microengineering;2019-05-07

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