Order of multiphoton excitation of sulfonium photo-acid generators used in photoresists based on SU-8
Author:
Affiliation:
1. Chemistry Department, University of Central Florida, Orlando, Florida 32816, USA
2. CREOL, The College of Optics and Photonics, University of Central Florida, Orlando, Florida 32816, USA
Funder
National Science Foundation (NSF)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4984828
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