Heavy-ion sources: The Star, or the Cinderella, of the ion-implantation firmament? (invited)
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1150330
Reference8 articles.
1. Canal rays to ion implantation: 1886-1986
2. Aspects of the physics, chemistry, and technology of high intensity heavy ion sources
3. A new ion source for electromagnetic isotope separators
4. Experimental study of an ion source for electromagnetic isotope separation with a view to high efficiency operation
5. Experimental study of an ion source for electromagnetic isotope separation with a view to high efficiency operation
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. ITEP Bernas ion source with additional electron beam;Review of Scientific Instruments;2006-03
2. Monoenergetic electron beam optimization in the bubble regime;Physics of Plasmas;2005-05
3. Space charge compensation of low energy ion beam;Review of Scientific Instruments;2002-02
4. Small anode source for efficient ion production;Review of Scientific Instruments;2002-02
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