Measurement of semiconductor surface potential using the scanning electron microscope
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3684556
Reference12 articles.
1. Secondary electron emission in the scanning electron microscope
2. Field-emission SEM imaging of compositional and doping layer semiconductor superlattices
3. High resolution quantitative two-dimensional dopant mapping using energy-filtered secondary electron imaging
4. Scanning capacitance spectroscopy on n+-p asymmetrical junctions in multicrystalline Si solar cells
5. Material contrast in SEM: Fermi energy and work function effects
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