Effects of active atomic sinks and reservoirs on the reliability of Cu∕low-k interconnects

Author:

Wei Frank L.,Hau-Riege Christine S.,Marathe Amit P.,Thompson Carl V.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference25 articles.

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4. Z.S. Choi, C. L. Gan, F. Wei, C. V. Thompson, J. H. Lee, K. L. Pey, and W. K. Choi, Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics—2004, MRS Symposia Proceedings No. 812 (Materials Research Society, Pittsburgh, 2004), p. 373.

5. The Effects of the Mechanical Properties of the Confinement Material on Electromigration in Metallic Interconnects

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1. Mitigating Electromigration in Physical Design;Fundamentals of Electromigration-Aware Integrated Circuit Design;2018

2. Blech Effect in Interconnects;Proceedings of the 2015 Symposium on International Symposium on Physical Design;2015-03-29

3. An Electromigration Failure Distribution Model for Short-Length Conductors Incorporating Passive Sinks/Reservoirs;IEEE Transactions on Device and Materials Reliability;2013-03

4. Void nucleation and growth contributions to the critical current density for failure of Cu vias;2009 IEEE International Reliability Physics Symposium;2009

5. Extensive analysis of resistance evolution due to electromigration induced degradation;Journal of Applied Physics;2008-12-15

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